- Resolution
(secondary electron
image): 5nm (at 25 kV, WD=10 mm)
- Accelerating voltage: 1 to 25 kV (7steps)
- Magnification: x 15 to 200,000 (25 steps) Auto-mag.
correction built-in at WD=10,20,48mm
Magnification memory Built-in
- Imaging modes: SEI (secondary electron image)
BEI (backscattered electron image)
- Lens system:Two-stage Condenser lens and Single-stage
Objective lens
- Focusing: Manual and auto-control
- Astigmatism correction: manual and auto-control
Stigmator memory built-in
- Image fine shift: Joystick built-in +/-10 µm in all direction
- Specimen stage: Eucentric goniometer
- specimen size: 10 mm dia. x 10 mmh,
32 mm dia. x 10 mmh, 51 mm dia. x 10 mmh
- Specimen movements: X=10mm, Y=20mm,
T=-40 to +90°:, R =360°: (endless)
- Working distance: 10, 20, 48 mm
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SEM Preparation Procedure 